JPS6186463U - - Google Patents

Info

Publication number
JPS6186463U
JPS6186463U JP17116084U JP17116084U JPS6186463U JP S6186463 U JPS6186463 U JP S6186463U JP 17116084 U JP17116084 U JP 17116084U JP 17116084 U JP17116084 U JP 17116084U JP S6186463 U JPS6186463 U JP S6186463U
Authority
JP
Japan
Prior art keywords
etching liquid
etching
stirrer
heater
stirs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17116084U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6339258Y2 (en]
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17116084U priority Critical patent/JPS6339258Y2/ja
Publication of JPS6186463U publication Critical patent/JPS6186463U/ja
Application granted granted Critical
Publication of JPS6339258Y2 publication Critical patent/JPS6339258Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP17116084U 1984-11-12 1984-11-12 Expired JPS6339258Y2 (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17116084U JPS6339258Y2 (en]) 1984-11-12 1984-11-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17116084U JPS6339258Y2 (en]) 1984-11-12 1984-11-12

Publications (2)

Publication Number Publication Date
JPS6186463U true JPS6186463U (en]) 1986-06-06
JPS6339258Y2 JPS6339258Y2 (en]) 1988-10-14

Family

ID=30728855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17116084U Expired JPS6339258Y2 (en]) 1984-11-12 1984-11-12

Country Status (1)

Country Link
JP (1) JPS6339258Y2 (en])

Also Published As

Publication number Publication date
JPS6339258Y2 (en]) 1988-10-14

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